Thermo Scientific focus ion beam (FIB)-Helios 5 CX dualbeam is equipped with highly automated, multisite, fastest and easiest sample preparation for S/TEM.
The key features are:
In SEM mode, extreme high resolution (1nm) at low acceleration voltage and 0.6nm at 15kV.
In ion beam mode, 4 nm resolution for 30kV.
Acceleration voltage for SEM range from 100V-30kV.
Acceleration voltage for ion beam range from 500V-30kV.
Auto-slice&view and 3-D reconstruction through Avizo software
.....
Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE)
• Elstar in-column SE/BSE detector (ICD)*
• Elstar in-column BSE detector (MD)*
• Everhart-Thornley SE detector (ETD)
• IR camera for viewing sample/column
• High-performance in-chamber electron and ion detector (ICE)
for secondary ions (SI) and electrons (SE)*
Thermo Scientific In-chamber Nav-Cam Camera for sample
navigation*
Retractable annular ring-like ABS detector
• Retractable, low-voltage, high-contrast, directional, solid-state
backscatter electron detector (DBS)*
• Retractable STEM 3+ detector with BF/ DF/ HAADF
segments*