实验设备

Thermo Scientific focus ion beam (FIB)-Helios 5 CX dualbeam

·2021年12月28日



Thermo Scientific focus ion beam (FIB)-Helios 5 CX dualbeam is equipped with highly automated, multisite, fastest and easiest sample preparation for S/TEM.

The key features are:

  1. In SEM mode, extreme high resolution (1nm) at low acceleration voltage and 0.6nm at 15kV.

  2. In ion beam mode, 4 nm resolution for 30kV.

  3. Acceleration voltage for SEM range from 100V-30kV.

  4. Acceleration voltage for ion beam range from 500V-30kV.

  5. Auto-slice&view and 3-D reconstruction through Avizo software

    .....

  • Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE)
    • Elstar in-column SE/BSE detector (ICD)*
    • Elstar in-column BSE detector (MD)*
    • Everhart-Thornley SE detector (ETD)
    • IR camera for viewing sample/column
    • High-performance in-chamber electron and ion detector (ICE)
    for secondary ions (SI) and electrons (SE)*

  • Thermo Scientific In-chamber Nav-Cam Camera for sample
    navigation*

  • Retractable annular ring-like ABS detector
    • Retractable, low-voltage, high-contrast, directional, solid-state
    backscatter electron detector (DBS)*
    • Retractable STEM 3+ detector with BF/ DF/ HAADF
    segments*


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