Brief description:

The JSM-6700F is a high resolution, easy-to-operate scaning electron microscope, based on a new cold filed emission gun electron source and employing state-of-the-art computer control and imaging. A conical FE gun and semi-inlens objective generate high resolution images. High definition, flicker-free images are displayed at 1280*1024 pixels and can easily be viewed under normal room lightting, even at slow scan speeds. A mouse and menu GUI interface, running under Windows 7, provides a familiar control interface and high performance networking.

Specifications: 

(1) Resolution: 1.0nm (at 15kV), 2.2nm (at 1kV) 

(2) Magnification: 25 to 19,000 (LM mode), 100 to 650,000 (SEM mode)

(3) Accelerating voltage: 0.5 to 30kV

(4) Specimen illumination current: 10^-13A to 2*10^-9A 

(5)Electron gun: cold cathode field emission type 

(6) Alignment: Electromagnetic deflection system 

(7) Objective lens: Strongly excited conical lens 

(8) Specimen chamber: Large chamber for 200mm specimen Modes of Operation: 1. Secondery electron (SE) mode with two JEOL detectors: Lower SE detector + In-Lens detector with voltage filter. 2. Backscattered Electron (BSE) mode with a retractable solid state BSE JEOL detector. 3. Element Analysis mode: VANTAGE X-ray microanalysis system of THERMONORAN provides element identification, quantitative microanalysis and mapping down beryllium.

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