Brief description: 

The Quanta 200 Scanning Electron Microscope (SEM) is a flexible, general purpose, simple-to-use instrument that can be operated in either regular high-vacuum or low-vacuum modes, enabling users to image a wide variety of samples. This ease of use allows users to start collecting data quickly after their initial training, along with making the instrument an excellent hands-on teaching platform for various Materials Science courses. The electron beam in this instrument is generated by a conventional tungsten filament electron source, which, under optimal conditions, is capable of resolving features as small as 3 nm. The Quanta is equipped with standard Secondary Electron (SE) and Back Scatter Electron (BSE) detectors, in addition to an Energy Dispersive X-ray Analysis (EDS) detector and an internal TV camera.

Specifications:

Electron Beam resolution

• High vacuum
  1.0 nm* at 30 kV (SE)
  2.5 nm at 30 kV (BSE)
  3.0 nm at 1 kV (SE)

• High vacuum with beam deceleration option
  3.0 nm at 1 kV (BD mode + BSED)
  2.3 nm at 1 kV (BD mode + ICD*)
  3.1 nm at 200 V (BD mode + ICD)

• Low vacuum
  1.4 nm at 30 kV (SE)
  2.5 nm at 30 kV (BSE)
  3.0 nm at 3 kV (SE)

• Extended vacuum mode (ESEM)
  1.4 nm at 30 kV (SE)

Detectors

Everhardt Thornley SED (secondary electron detector)

• Large Field Low vacuum SED (LFD)

• Gaseous SED (GSED) (used in ESEM mode)

• High sensitivity low kV SS-BSED

• IR camera for viewing sample in chamber

• Gaseous BSED (BSE detector for high pressures, used in ESEM mode)

• 4 quadrant solid-state BSED